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Lee, M. (author), Robin, M.P. (author), Guis, R.H. (author), Filippozzi, U. (author), Shin, D. (author), van Thiel, T.C. (author), Paardekooper, Stijn P. (author), Renshof, Johannes R. (author), van der Zant, H.S.J. (author), Caviglia, A. (author), Verbiest, G.J. (author), Steeneken, P.G. (author)Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath...journal article 2022
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Lee, M. (author), Renshof, Johannes R. (author), van Zeggeren, K.J. (author), Houmes, M.J.A. (author), Lesne, E.L. (author), Siskins, M. (author), van Thiel, T.C. (author), Guis, R.H. (author), van Blankenstein, M.R. (author), Verbiest, G.J. (author), Caviglia, A. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes...journal article 2022