Forcing mechanisms of dielectric barrier discharge plasma actuators at carrier frequency of 625 Hz

The forcing behavior of a dielectric barrier discharge (DBD) actuator is investigated experimentally using a time-resolved particle image velocimetry (PIV) system in conjunction with a phase shifting technique. The spatio-temporal evolution of the induced flowfield is accurately captured within one high voltage (HV) cycle allowing the...

Intermediate frequency band digitized high dynamic range radiometer system for plasma diagnostics and real-time Tokamak control

An intermediate frequency (IF) band digitizing radiometer system in the 100–200 GHz frequency range has been developed for Tokamak diagnostics and control, and other fields of research which require a high flexibility in frequency resolution combined with a large bandwidth and the retrieval of the full wave information of the mm-wave signals...

Deep anisotropic dry etching of silicon microstructures by high-density plasmas

This thesis deals with the dry etching of deep anisotropic microstructures in monocrystalline silicon by high-density plasmas. High aspect ratio trenches are necessary in the fabrication of sensitive inertial devices such as accellerometers and gyroscopes. The etching of silicon in fluorine-based plasmas is isotropic. To obtain anisotropy the...