Transversal optical singularity induced precision measurement of step-nanostructures

Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor e^il^θ, and contain a phase singularity in the middle of its beam. In the case of a transversal optical...

Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry

Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a step-shaped silicon nanostructure. By employing an optical singular...

Plasmonic tweezers: for nanoscale optical trapping and beyond

Optical tweezers and associated manipulation tools in the far field have had a major impact on scientific and engineering research by offering precise manipulation of small objects. More recently, the possibility of performing manipulation with surface plasmons has opened opportunities not feasible with conventional far-field optical methods....

Determination of steep sidewall angle using polarization-sensitive asymmetric scattering

The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are close to 90°. Here, we propose a far-field detection system to...