Direct detection of polystyrene equivalent nanoparticles with a diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry

Coherent Fourier scatterometry (CFS) has been introduced to fulfil the need for noninvasive and sensitive inspection of subwavelength nanoparticles in the far field. The technique is based on detecting the scattering of coherent light when it is focused on isolated nanoparticles. In the present work, we describe the results of an experimental...