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Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...journal article 2011
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- Correia, J.H. (author), de Graaf, G. (author), Bartek, M. (author), Wolffenbuttel, R.F. (author) journal article 2001
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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm–400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization by passing monochromatic light through the...journal article 2010
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- Wijngaards, D.D.L. (author), Wolffenbuttel, R.F. (author) journal article 2003
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Correia, J.H. (author), Emadi, A.R. (author), Wolffenbuttel, R.F. (author)This paper describes the design and modeling of a UV bandpass optical filter for microspectrometers. The materials used for fabricating the multilayer UV filter are: silicon dioxide (SiO2), titanium dioxide (TiO2) and yttrium oxide (Y2O3). The optical filter shows a bandpass response wavelength in the range 230-280 nm, with a transmittance...journal article 2006
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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)In this paper the concept of a microspectrometer based on a Linear Variable Optical Filter (LVOF) for operation in the visible spectrum is presented and used in two different designs: the first is for the narrow spectral band between 610 nm and 680 nm, whereas the other is for the wider spectral band between 570 nm and 740 nm. Design...journal article 2011
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- French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1996
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- Wolffenbuttel, R.F. (author) journal article 2004
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- Wolffenbuttel, R.F. (author), de Graaf, G. (author) journal article 1995
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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)In CMOS-compatible optical filter designs, SiO2 is often used as the low-index material, limiting the optical contrast (nHi/nLo) to about 2. Using the air as low-index material improves the optical contrast by about 50%, thus increasing the reflectivity and bandwidth at a given design complexity. The design and fabrication of a 4-layered air...journal article 2014
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- Grabarnik, S. (author), Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Vdovin, G. (author), Wolffenbuttel, R.F. (author) journal article 2008
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Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...journal article 2012
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- de Graaf, G. (author), Wolffenbuttel, R.F. (author) journal article 1997
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Dias, R.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author), Rocha, L.A. (author)The pull-in time of electrostatically actuated parallel-plate microstructures enables the realization of a high-sensitivity accelerometer that uses time measurement as the transduction mechanism. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external...journal article 2012
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Wu, H. (author), Grabarnik, S. (author), Emadi, A. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)The spectral resolution of a MEMS-based IR microspectrometer critically depends on the thermal cross-talk between adjacent TE elements in the detector array. Thermal isolation between elements is realized by using bulk micromachining directly following CMOS processing. This paper reports on the characterization results of bridge-shaped TE...journal article 2009
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- Wolffenbuttel, R.F. (author), Blaauw, E.J. (author), Wolffenbuttel, M.R. (author), de Graaf, G. (author) journal article 1991
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Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, R.F. (author), Wolffenbuttel, R.F. (author)This paper presents spectral measurements using a linear variable optical filter. A LVOF has been developed for operation in the 530 nm–720 nm spectral band and has been fabricated in an IC-compatible process. The LVOF has been mounted on a CMOS camera. A Least Mean Square algorithm has been implemented to calculate the spectrum of light from...journal article 2010
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- Wolffenbuttel, M.R. (author), Regtien, P.P.L. (author) journal article 1995
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Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)This paper provides experimental validation of the predictions by two recent models for squeezed film damping in the free molecule regime. Measurements were carried out using a parallel-plate microstructure with a 2.29 ?m gap operated at pressures from 105 to 101 Pa (corresponding to Knudsen numbers from 0.03 to 300). Experiments are in good...journal article 2009
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- De Graaf, G. (author), Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author) journal article 2005