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Yao, Z. (author), Yang, G. (author), Han, C. (author), Procel Moya, P.A. (author), Özkol, E. (author), Yan, J. (author), Zhao, Y. (author), Cao, L. (author), van Swaaij, R.A.C.M.M. (author), Mazzarella, L. (author), Isabella, O. (author)Passivating contacts are crucial for realizing high-performance crystalline silicon solar cells. Herein, contact formation by plasma-enhanced chemical vapor deposition (PECVD) followed by an annealing step is focused on. Poly-SiO<sub>x</sub> passivating contacts by combining plasma-assisted N<sub>2</sub>O-based oxidation of silicon (PANO-SiO...journal article 2023
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Cao, L. (author), Procel Moya, P.A. (author), Alcañiz Moya, A. (author), Yan, J. (author), Tichelaar, F.D. (author), Özkol, E. (author), Zhao, Y. (author), Han, C. (author), Yang, G. (author), Yao, Z. (author), Zeman, M. (author), Santbergen, R. (author), Mazzarella, L. (author), Isabella, O. (author)Thin films of transition metal oxides such as molybdenum oxide (MoO<sub>x</sub>) are attractive for application in silicon heterojunction solar cells for their potential to yield large short-circuit current density. However, full control of electrical properties of thin MoO<sub>x</sub> layers must be mastered to obtain an efficient hole...journal article 2022