document

High sensitive gas sensors realized by a transfer-free process of CVD graphene

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)

The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices...

conference paper 2016

document

A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

Vollebregt, S. (author), Alfano, B. (author), Ricciardella, F. (author), Giesbers, A.J.M. (author), Hagendoorn, Y. (author), van Zeijl, H.W. (author), Polichetti, T (author), Sarro, Pasqualina M (author)

In this paper we report a novel transfer-free graphene fabrication process, which does not damage the graphene layer. Uniform graphene layers on 4" silicon wafers were deposited by chemical vapor deposition using the CMOS compatible Mo catalyst. Removal of the Mo layer after graphene deposition results in a transfer-free and controlled placement...

conference paper 2016

document

Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis

Silvestri, C. (author), Riccio, M. (author), Poelma, R.H. (author), Morana, B. (author), Vollebregt, S. (author), Santagata, F. (author), Irace, A. (author), Zhang, G.Q. (author), Sarro, P.M. (author)

Thermal material properties play a fundamental role in the thermal management of microelectronic systems. The porous nature of carbon nanotube (CNT) arrays results in a very high surface area to volume ratio, which makes the material attractive for surface driven heat transfer mechanisms. Here, we report on the heat transfer performance of...

journal article 2016

document

Stretchable Binary Fresnel Lens for Focus Tuning

Li, X. (author), Wei, L. (author), Poelma, René H. (author), Vollebregt, S. (author), Wei, J. (author), Urbach, Paul (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)

This paper presents a tuneable binary amplitude Fresnel lens produced by wafer-level microfabrication. The Fresnel lens is fabricated by encapsulating lithographically defined vertically aligned carbon nanotube (CNT) bundles inside a polydimethyl-siloxane (PDMS) layer. The composite lens material combines the excellent optical absorption...

journal article 2016

document

Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T. (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)

In this paper we report on gas sensors based on graphene grown by Chemical Vapor Deposition at 850 °C. Mo was used as catalyst for graphene nucleation. Resistors were directly designed on pre-patterned Mo using the transfer-free process we recently developed, thus avoiding films damage during the transfer to the target substrate. Devices...

conference paper 2017

document

High sensitive CVD graphene-based gas sensors operating under environmental conditions

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T. (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)

abstract 2017

document

Effect of droplet shrinking on surface acoustic wave response in microfluidic applications

Bui, T.H. (author), Nguyen, V.C. (author), Vollebregt, S. (author), Morana, B. (author), van Zeijl, H.W. (author), Chu Duc, Trinh (author), Sarro, Pasqualina M (author)

The effect of the contact angle and radius of a microsize droplet on the surface acoustic wave (SAW) response for microfluidic applications is reported. It is studied through the dynamic change of the droplet shape during the evaporation process. An aluminium nitride SAW device, operating at 125.7 MHz, is utilized to investigate the...

journal article 2017

document

Suspended graphene beams with tunable gap for squeeze-film pressure sensing

Vollebregt, S. (author), Dolleman, R.J. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)

We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control...

conference paper 2017

document

CVD transfer-free graphene for sensing applications

Schiattarella, Chiara (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Alfano, Brigida (author), Massera, Ettore (author), Miglietta, Maria L. (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)

The sp² carbon-based allotropes have been extensively exploited for the realization of gas sensors in the recent years because of their high conductivity and large specific surface area. A study on graphene that was synthetized by means of a novel transfer-free fabrication approach and is employed as sensing material is herein...

journal article 2017

document

An innovative approach to overcome saturation and recovery issues of CVD graphene-based gas sensors

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)

<br/>In this work, we present an innovative method which enables to solve fundamental limitations affecting graphene-based chemi-sensors operating under environmental conditions, namely the lack of signal saturation and the scarce recovery after the detection step. The method, which exploits the differential current instead of the current itself...

conference paper 2017

document

Effects of graphene defects on gas sensing properties towards NO 2 detection

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Miscuglio, Mario (author), Alfano, Brigida (author), Miglietta, Maria L (author), Massera, Ettore (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)

The crystal structure of graphene flakes is expected to significantly affect their sensing properties. Here we report an experimental investigation on the crystalline structure of graphene aimed at exploring the effects on the gas sensing properties. The morphology of graphene, prepared via Chemical Vapor Deposition (CVD), Liquid Phase...

journal article 2017

document

A transfer-free approach to wafer-scale graphene deposited by chemical vapour deposition

Vollebregt, S. (author), Ricciardella, F. (author), Romijn, J. (author), Singh, M. (author), Shi, Shengtai (author), Sarro, Pasqualina M (author)

abstract 2018

document

Effects of Conformal Nanoscale Coatings on Thermal Performance of Vertically Aligned Carbon Nanotubes

Silvestri, C. (author), Riccio, Michele (author), Poelma, René H. (author), Jovic, A. (author), Morana, B. (author), Vollebregt, S. (author), Irace, Andrea (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)

The high aspect ratio and the porous nature of spatially oriented forest-like carbon nanotube (CNT) structures represent a unique opportunity to engineer a novel class of nanoscale assemblies. By combining CNTs and conformal coatings, a 3D lightweight scaffold with tailored behavior can be achieved. The effect of nanoscale coatings, aluminum...

journal article 2018

document

A miniaturized low power Pirani pressure sensor based on suspended graphene

Romijn, J. (author), Vollebregt, S. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)

Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure...

conference paper 2018

document

Transfer-free graphene-based differential pressure sensor

Ramesha, Raghutham (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)

Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this...

conference paper 2019

document

A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS Sensors

Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author)

In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used,...

conference paper 2019

document

Growth of multi-layered graphene on molybdenum catalyst by solid phase reaction with amorphous carbon

Ricciardella, F. (author), Vollebregt, S. (author), Kurganova, Evgenia (author), Giesbers, A.J.M. (author), Ahmadi, M. (author), Sarro, Pasqualina M (author)

A method to grow multi layers graphene (MLG) just by thermal annealing in an inert atmosphere is reported. A molybdenum (Mo) catalyst layer is used in combination with a solid amorphous carbon (a-C) source on top or below the Mo layer. The formation of MLG directly on top of the catalyst substrate surface is confirmed by Raman spectroscopy,...

journal article 2019

document

Analysis of a calibration method for non-stationary CVD multi-layered graphene-based gas sensors

Ricciardella, F. (author), Polichetti, Tiziana (author), Vollebregt, S. (author), Alfano, Brigida (author), Massera, Ettore (author), Sarro, Pasqualina M (author)

Limitations such as lack of detected stationary signal and slow signal recovery after detection currently affect graphene-based chemi-sensors operating at room temperature. In this work, we model the behavior of a sensor in a test chamber having limited volume and simulating the environmental conditions. From this model, we mathematically derive...

journal article 2019

document

Low-humidity sensing properties of multi-layered graphene grown by chemical vapor deposition

Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Sarro, Pasqualina M (author), Duesberg, Georg S. (author)

Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of...

journal article 2020

document

Wafer-scale transfer-free process of multi-layered graphene grown by chemical vapor deposition

Ricciardella, F. (author), Vollebregt, S. (author), Boshuizen, B. (author), Danzl, F.J.K. (author), Cesar, Ilkay (author), Spinelli, Pierpaolo (author), Sarro, Pasqualina M (author)

Chemical vapour deposition (CVD) has emerged as the dominant technique to combine high quality with large scale production of graphene. The key challenge for CVD graphene remains the transfer of the film from the growth substrate to the target substrate while preserving the quality of the material. Avoiding the transfer process of single or...

journal article 2020