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- Allier, C.P. (author), Hollander, R.W. (author), Sarro, P.M. (author), de Boer, M. (author), van Eijk, C.W.E. (author) journal article 2000
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Wei, J. (author), Chen, Z.L. (author), Liu, Z.W. (author), Sarro, P.M. (author)This paper presents a silicon MEMS capacitive structure to investigate a test methodology for fF-level capacitive sensors’ measurement. The device mimics a capacitive sensor with a changing intermediate layer between the electrodes. A single mask bulk micromachining process is used to fabricate the device, which has a nominal capacitance of 1.2...journal article 2010
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...journal article 2011
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Pandraud, G. (author), Margallo-Balbas, E. (author), Sarro, P.M. (author)We have studied, for the first time, the sensing capabilities of plasma-enhanced chemical vapor deposition (PECVD) SiC-SiO2-SiC horizontal slot waveguides. Optical propagation losses were measured to be 23.9 dB?cm for the quasi-transverse magnetic mode. To assess the potential of this device as a sensor, we simulated the confinement factor in...journal article 2012
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- Sassen, W.P. (author), Henneken, V.A. (author), Tichem, M. (author), Sarro, P.M. (author) journal article 2008
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Mihailovic, M. (author), Rops, C. (author), Creemer, J.F. (author), Sarro, P.M. (author)A new design of micro-evaporators, with 45 channels (View the MathML source100?m deep) and diamond-shaped fins (View the MathML source40?m wide, View the MathML source160?m long, View the MathML source20?m separation), is fabricated by anodic bonding of silicon and glass wafers, in a five masks process. This new design improves stability of the...journal article 2010
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Silvestri, C. (author), Riccio, M. (author), Poelma, R.H. (author), Morana, B. (author), Vollebregt, S. (author), Santagata, F. (author), Irace, A. (author), Zhang, G.Q. (author), Sarro, P.M. (author)Thermal material properties play a fundamental role in the thermal management of microelectronic systems. The porous nature of carbon nanotube (CNT) arrays results in a very high surface area to volume ratio, which makes the material attractive for surface driven heat transfer mechanisms. Here, we report on the heat transfer performance of...journal article 2016
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- Van Zeijl, H.W. (author), Sarro, P.M. (author) journal article 2010
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- Krecinic, F. (author), Chu Duc, T. (author), Lau, G.K. (author), Sarro, P.M. (author) journal article 2008
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- Pham, N.P. (author), Burghartz, J.N. (author), Sarro, P.M. (author) journal article 2005
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- Paalvast, S.L. (author), Van Zeijl, H.W. (author), Su, J. (author), Sarro, P.M. (author), Van Eijk, J. (author) journal article 2007
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- Lau, G.K. (author), Chu Duc, T. (author), Goosen, J.F.L. (author), Sarro, P.M. (author), Van Keulen, F. (author) journal article 2007
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- Allier, C.P. (author), Hollander, R.W. (author), Sarro, P.M. (author), Van Eijk, C.W.E. (author) journal article 1999
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Sarro, P.M. (author)Micro-electro-mechanical systems (MEMS) or Microsystems technology (MST) is a fascinating and exciting field which significantly contributes to build a bridge between science and society. Physical properties and material characteristics are translated into structures and devices that can have a large positive impact on people’s lives. Silicon...journal article 2008
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Estevez, P. (author), Bank, J. (author), Porta, M. (author), Wei, J. (author), Sarro, P.M. (author), Tichem, M. (author), Staufer, U. (author)This paper presents the design, fabrication and characterization of a piezoresistive 6 Degrees of Freedom (DOF) force and torque sensor to be used in micro-manipulation. The mechanical structure of the device consists of 7 suspended beams and a calibration structure, which can be replaced by micro-manipulation tools such as micro-grippers or...journal article 2011
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- Duc, T.C. (author), Creemer, J.F. (author), Sarro, P.M. (author) journal article 2006
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- Hijzen, E.A. (author), Schooneveld, E.M. (author), van Eijk, C.W.E. (author), Hollander, R.W. (author), Sarro, P.M. (author), van den Bogaard, A. (author) journal article 1994
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- Iordanov, V.P. (author), Bastemeijer, J. (author), Ishihara, R. (author), Sarro, P.M. (author), Bossche, A. (author), Vellekoop, M.J. (author) journal article 2004
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Venstra, W.J. (author), Spronck, J.W. (author), Sarro, P.M. (author), Van Eijk, J. (author)Photolithography on high topography substrates, such as the sidewalls or the bottom of cavities and trenches created by bulk micromachining, enables the design of complex three-dimensional structures. When a contact lithography system is used to pattern such substrates, local gaps exist between the mask and the substrate. In this paper we...journal article 2009
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- Kwa, T.A. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author) journal article 1997