The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Analyzing Protein Denaturation using Fast Differential Scanning Calorimetry

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

Single-Mask Fabrication of Temperature Triggered MEMS Switch for Cooling Control in SSL System

Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating

Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors

Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

6 DOF Force and Torque Sensor for Micro-manipulation Applications

In situ HRTEM of a catalyst using a nanoreactor at 1 bar

Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations

Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity

Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2

Suspended Submicron Silicon-Beam for High Sensitivity Piezoresistive Sensing

A Buried Vertical Filter for Micro and Nanoparticle Filtration

PECVD silicon carbide surface micromachining technology and selected MEMS applications

From 2-Dimensional Lithography To 3-Dimensional Structures

From 2D Lithography to 3D Patterning

MEMS silicon-based micro-evaporator with diamond-shaped fins

Temperature dependence of the resonance frequency of thermogravimetric devices