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Searched for: %2520
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The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes
Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating
Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
Influence of seed layer on crystallinity and orientation of pulsed — DC sputtered AlN thin-films for piezoelectric actuators
Searched for: %2520
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