Direct Wafer-Scale CVD Graphene Growth under Platinum Thin-Films

Since the transfer process of graphene from a dedicated growth substrate to another substrate is prone to induce defects and contamination and can increase costs, there is a large interest in methods for growing graphene directly on silicon wafers. Here, we demonstrate the direct CVD growth of graphene on a SiO2 layer on a silicon wafer by...

Calibrated quantum thermometry in cavity optomechanics

Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...

Quantum thermometry in optomechanics

We describe a method to control the cavity detuning in optomechanics experiments. This helps accurate measurements of the asymmetry in the motional sidebands, that testify the quantum behavior of the oscillator and quantifies its occupation number.

Silicon Nitride MOMS Oscillator for Room Temperature Quantum Optomechanics

Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...

Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...

Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_<i>x</i> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_<i>x</i> membranes were fabricated and used as optomechanical resonators in a...