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Revyn, N. (author), Hu, Michel H.Y. (author), Frimat, Jean-Philippe (author), de Wagenaar, B. (author), van den Maagdenberg, Arn M.J.M. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author)We present preliminary recordings on chip of three-dimensional (3D) electric neuronal activity from cultures of cortical neurons derived from human-induced pluripotent stem cells (hiPSCs). The recordings were obtained through 3D microelectrode arrays (MEAs) composed of truncated, 90 μm-high Si micropyramids endowed with multiple, electrically...conference paper 2022
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Romijn, J. (author), Vollebregt, S. (author), May, Alexander (author), Erlbacher, Tobias (author), van Zeijl, H.W. (author), Leijtens, J.A.P. (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of...conference paper 2022
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Zhan, Teng (author), Sun, J. (author), Feng, Tao (author), Zhang, Yulong (author), Zhou, Binru (author), Zhang, Banghong (author), Wang, Junxi (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)Recent research focusing on wide-bandgap and two-dimensional materials with a Schottky junction has provided a new concept for ultraviolet photodetectors. However, the working mechanism of the Schottky junction-based detector varies depending on the photosensitive materials used and the device structure. We demonstrated a TiO<sub>2</sub>...journal article 2022
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...journal article 2022
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Chan, H.W. (author), Prodanovic, V. (author), Theulings, A.M.M.G. (author), ten Bruggencate, T. (author), Hagen, C.W. (author), Sarro, Pasqualina M (author), van der Graaf, H. (author)Large-area transmission dynodes were fabricated by depositing an ultra-thin continuous film on a silicon wafer with a 3-dimensional pattern. After removing the silicon, a corrugated membrane with enhanced mechanical properties was formed. Mechanical metamaterials, such as this corrugated membrane, are engineered to improve its strength and...journal article 2022
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years in many research fields, such as power electronics, high operation temperature circuits, harsh environmental sensing, and more. To facilitate research on complex integrated SiC circuits, ensure reproducibility, and cut down cost, the availability of a...journal article 2022
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Romijn, J. (author), Vollebregt, S. (author), Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Leijtens, Johan (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are...journal article 2022
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Motreuil-Ragot, P.A. (author), Turcan, G. (author), de Wagenaar, B. (author), Hunt, A. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author)Sensing flow rates in structured microenvironments like lab-on-chip (LOC) and organ-on-chip (OoC) is crucial to assess important parameters such as transport of media and molecules of interest. So far, these micro-electromechanical systems for biology (bio-MEMS) mostly rely on flow sensing systems based on thermal sensors. However, thermal...conference paper 2022
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- Revyn, N. (author), Hu, Michel (author), Frimat, Jean-Philippe (author), van den Maagdenberg, Arn M.J.M. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author) poster 2021
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- Aydogmus, H. (author), van Ginkel, H.J. (author), Galiti, A-D. (author), Hu, M.H.Y. (author), Frimat, J-P. (author), van den Maagdenberg, A.M.J.M. (author), Zhang, Kouchi (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author) poster 2021
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- Dostanic, M. (author), Windt, L.M. (author), Stein, J.M. (author), van Meer, B.J. (author), Diakou, A. (author), Mummery, C.L. (author), Sarro, Pasqualina M (author), Mastrangeli, Massimo (author) poster 2021
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Chan, H.W. (author), Prodanovic, V. (author), Theulings, A.M.M.G. (author), Hagen, C.W. (author), Sarro, Pasqualina M (author), v.d. Graaf, H. (author)The (secondary) electron emission from multilayered Al2O3/TiN membranes has been investigated with a hemispherical collector system in a scanning electron microscope for electrons with energies between 0.3 and 10 keV. These ultra-thin membranes are designed to function as transmission dynodes in novel vacuum electron multipliers. Two...journal article 2021
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Serra, E. (author), Borrielli, Antonio (author), Marin, Francesco (author), Marino, Francesco (author), Malossi, Nicola (author), Morana, B. (author), Piergentili, Paolo (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author)Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators...journal article 2021
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Ricciardella, F. (author), Vollebregt, S. (author), Tilmann, Rita (author), Hartwig, Oliver (author), Bartlam, Cian (author), Sarro, Pasqualina M (author), Sachdev, Hermann (author), Duesberg, Georg S. (author)Chemical vapor deposition (CVD) has been demonstrated as a highly promising technique for the production of graphene on large scale and enabling tunability of the intrinsic defects of the films during the synthesis.<br/><br/>In this work, we report on the correlation between the density of defects (DoD) and the kinetics of interaction of multi...journal article 2021
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Romijn, J. (author), Middelburg, L.M. (author), Vollebregt, S. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), May, Alexander (author), Erlbacher, Tobias (author), Zhang, Kouchi (author), Sarro, Pasqualina M (author)Accurately sensing the temperature in silicon carbide (power) devices is of great importance to their reliable operation. Here, temperature sensors by resistive and CMOS structures are fabricated and characterized in an open silicon carbide CMOS technology. Over a range of 25-200°C, doped design layers have negative temperature coefficients of...conference paper 2021
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Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...journal article 2021
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Sun, J. (author), Zhan, Teng (author), Sokolovskij, R. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)Based on our proposed precision two-step gate recess technique, a suspended gate-recessed Pt/AlGaN/GaN heterostructure gas sensor integrated with a micro-heater is fabricated and characterized. The controllable two-step gate recess etching method, which includes O2 plasma oxidation of nitride and wet etching, improves gas sensing performance....journal article 2021
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Hong, H. (author), Ye, Li (author), Li, Ke (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author), Liu, Zewen (author)In this paper, we report a modified three step anisotropic wet etching (TSWE) method to fabricate solid-state silicon nanoslits. The slit-opening process is performed by <111> crystal plane etching. The etching rate of the <111> crystal plane is reasonably slow as it is only 1/45 of the <100> etching rate, thus allowing and...conference paper 2021
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Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Leijtens, Johan (author), Sarro, Pasqualina M (author)In this paper we present a sun position sensor platform with a scalable approach for the 3D integration of the sensor optics. This would facilitate the sun position sensor miniaturization, reduces fabrication cost and mitigates the need for sensor calibration. The sun position sensor platform is implemented in a seven mask BICMOS technology with...conference paper 2021