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Quiros Solano, W.F. (author), Gaio, N. (author), Stassen, O.M.J.A. (author), Arik, Y.B. (author), Silvestri, C. (author), Van Engeland, N.C.A. (author), Van der Meer, A. (author), Passier, R. (author), Sahlgren, C.M. (author), Bouten, C.V.C. (author), van den Berg, A. (author), Dekker, R. (author), Sarro, Pasqualina M (author)We present a novel and highly reproducible process to fabricate transferable porous PDMS membranes for PDMS-based Organs-on-Chips (OOCs) using microelectromechanical systems (MEMS) fabrication technologies. Porous PDMS membranes with pore sizes down to 2.0 μm in diameter and a wide porosity range (2–65%) can be fabricated. To overcome issues...journal article 2018
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Serra, E. (author), Morana, B. (author), Borrielli, Antonio (author), Marin, Francesco (author), Pandraud, G. (author), Pontin, Antonio (author), Prodi, Giovanni Andrea (author), Sarro, Pasqualina M (author), Bonaldi, Michele (author)Optomechanical SiN nano-oscillators in high-finesse Fabry-Perot cavities can be used to investigate the interaction between mechanical and optical degree of freedom for ultra-sensitive metrology and fundamental quantum mechanical studies. In this paper, we present a nano-oscillator made of a high-stress round-shaped SiN membrane with an...journal article 2018
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Pontin, A. (author), Bonaldi, M. (author), Borrielli, A. (author), Marconi, L. (author), Marino, F. (author), Pandraud, G. (author), Prodi, G.A. (author), Sarro, Pasqualina M (author), Serra, E. (author), Marin, F. (author)According to quantum mechanics, if we keep observing a continuous variable we generally disturb its evolution. For a class of observables, however, it is possible to implement a so-called quantum nondemolition measurement: by confining the perturbation to the conjugate variable, the observable is estimated with arbitrary accuracy, or prepared...journal article 2018
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Sokolovskij, R. (author), Zhang, Jian (author), Iervolino, E. (author), Zhao, Changhui (author), Santagata, F. (author), Wang, F. (author), Yu, Hongyu (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)AlGaN/GaN high electron mobility transistor (HEMT)-based sensors with catalytic platinum gate were micro-fabricated on commercially available epitaxial wafers and extensively characterized for ppm level hydrogen sulfide (H<sub>2</sub>S) detection for industrial safety applications. High operating temperature above 150 °C enabled large signal...journal article 2018
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Pennazza, Giorgio (author), Santonico, Marco (author), Vollero, Luca (author), Zompanti, A. (author), Sabatini, A. (author), Kumar, Nandeesh (author), Pini, Ivan (author), Quiros Solano, W.F. (author), Sarro, Pasqualina M (author), D'Amico, Arnaldo (author)This paper presents an advanced voltammetric system to be used as electronic tongue for liquid and gas analysis. It has been designed to be more flexible and accurate with respect to other existing and similar systems. It features improved electronics and additional operative conditions. Among others these include the possibility to optically...journal article 2018
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Miscuglio, Mario (author), Alfano, Brigida (author), Miglietta, Maria L (author), Massera, Ettore (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)The crystal structure of graphene flakes is expected to significantly affect their sensing properties. Here we report an experimental investigation on the crystalline structure of graphene aimed at exploring the effects on the gas sensing properties. The morphology of graphene, prepared via Chemical Vapor Deposition (CVD), Liquid Phase...journal article 2017
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Bui, T.H. (author), Nguyen, V.C. (author), Vollebregt, S. (author), Morana, B. (author), van Zeijl, H.W. (author), Chu Duc, Trinh (author), Sarro, Pasqualina M (author)The effect of the contact angle and radius of a microsize droplet on the surface acoustic wave (SAW) response for microfluidic applications is reported. It is studied through the dynamic change of the droplet shape during the evaporation process. An aluminium nitride SAW device, operating at 125.7 MHz, is utilized to investigate the...journal article 2017
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Schiattarella, Chiara (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Alfano, Brigida (author), Massera, Ettore (author), Miglietta, Maria L. (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)The sp<sup>2</sup> carbon-based allotropes have been extensively exploited for the realization of gas sensors in the recent years because of their high conductivity and large specific surface area. A study on graphene that was synthetized by means of a novel transfer-free fabrication approach and is employed as sensing material is herein...journal article 2017
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Bui, T.H. (author), Morana, B. (author), Akhnoukh, A.B. (author), Chu Duc, Trinh (author), Sarro, Pasqualina M (author)A surface-acoustic-mode aluminum nitride (AlN) transducer is utilized to determine the type of liquid dropped on the propagation path. It is based on tracking the shrinking droplet radius and observing stagnant liquid molecules during and after the liquid evaporation process. The device configuration is suitable to test small amounts of...journal article 2017
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Gaio, N. (author), van Meer, B. (author), Quiros Solano, W.F. (author), Bergers, L. (author), van de Stolpe, A. (author), Mummery, CL (author), Sarro, Pasqualina M (author), Dekker, R. (author)Organ-on-Chips (OOCs) are micro-fabricated devices which are used to culture cells in order to mimic functional units of human organs. The devices are designed to simulate the physiological environment of tissues in vivo. Cells in some types of OOCs can be stimulated in situ by electrical and/or mechanical actuators. These actuations can mimic...journal article 2016
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Li, X. (author), Wei, L. (author), Poelma, René H. (author), Vollebregt, S. (author), Wei, J. (author), Urbach, Paul (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)This paper presents a tuneable binary amplitude Fresnel lens produced by wafer-level microfabrication. The Fresnel lens is fabricated by encapsulating lithographically defined vertically aligned carbon nanotube (CNT) bundles inside a polydimethyl-siloxane (PDMS) layer. The composite lens material combines the excellent optical absorption...journal article 2016
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Silvestri, C. (author), Riccio, M. (author), Poelma, R.H. (author), Morana, B. (author), Vollebregt, S. (author), Santagata, F. (author), Irace, A. (author), Zhang, G.Q. (author), Sarro, P.M. (author)Thermal material properties play a fundamental role in the thermal management of microelectronic systems. The porous nature of carbon nanotube (CNT) arrays results in a very high surface area to volume ratio, which makes the material attractive for surface driven heat transfer mechanisms. Here, we report on the heat transfer performance of...journal article 2016
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Precision Recess of AlGaN/GaN with Controllable Etching Rate Using ICP-RIE Oxidation and Wet EtchingSokolovskij, R. (author), Sun, J. (author), Santagata, F. (author), Iervolino, E. (author), Li, S. (author), Zhang, G.Y. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A method for highly controllable etching of AlGaN/GaN for the fabrication of high sensitivity HEMT based sensors is developed. The process consists of cyclic oxidation of nitride with O<sub>2</sub> plasma using ICP-RIE etcher followed by wet etching of the oxidized layer. Previously reported cyclic oxidation-based GaN etching obtained very...journal article 2016
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Thomas, S. (author), Jovic, A. (author), Morana, B. (author), Buja, F. (author), Gkouzou, A. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this paper we present the characterization of the coefficient of thermal expansion (CTE) of in-situ doped polycrystalline SiC thin films, obtained by low pressure chemical vapor deposition (LPCVD). The material is characterized using V-beam actuators on which the temperature coefficient of resistance (TCR) and the in-plane displacement...journal article 2016
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Serra, E. (author), Bawaj, M. (author), Borrielli, A. (author), Di Giuseppe, G. (author), Forte, S. (author), Kralj, N. (author), Malossi, N. (author), Marconi, L. (author), Marin, F. (author), Marino, F. (author), Morana, B. (author), Natali, R. (author), Pandraud, G. (author), Pontin, A. (author), Prodi, G.A. (author), Rossi, M. (author), Sarro, Pasqualina M (author), Vitali, D. (author), Bonaldi, M. (author)In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN<sub><i>x</i></sub> membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN<sub><i>x</i></sub> membranes were fabricated and used as optomechanical resonators in a...journal article 2016
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Sarro, Pasqualina M (author)Sensing and stimulating microstructures are necessary to develop more specialized and highly accurate Organ-on-Chip (OOC) platforms. In this paper, we present the integration of a conductive polymer, poly (3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS), on a stretchable membrane, core element of an Heart-on-Chip. The electrical...journal article 2016
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Prodanovic, V. (author), Chan, H.W. (author), Smedley, J. (author), Theulings, A. (author), Tao, S. (author), Van der Graaf, H. (author), Sarro, P.M. (author)The excellent overall properties of silicon nitride, particularly its mechanical strength and resistance to many etchants, make it a widely used material for microsensors and microactuators. In this paper silicon-rich silicon nitride (SRN) films were investigated as material for ultra-thin transmission dynodes in electron multiplication. These...journal article 2015
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Syed, W.H. (author), Fiorentino, G. (author), Cavallo, D. (author), Spirito, M. (author), Sarro, Pasqualina M (author), Neto, A. (author)In this paper, we demonstrate, at 300 GHz and with integrated technology, the effectiveness of artificial dielectric layers to enhance the front-to-back ratio of printed antennas. This concept was previously proposed at microwave frequencies and using printed circuit board technology. The artificial material is now realized by introducing non...journal article 2015
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Fiorentino, G. (author), Syed, W. (author), Adam, A. (author), Neto, A. (author), Sarro, P.M. (author)The refractive index of a conventional dielectric layer can be enhanced using an Artificial Dielectric Layer (ADL). Here we present the fabrication of low temperature PECVD Silicon Carbide (SiC) membranes with very high refractive index (up to 5 at 1 THz) in the terahertz frequency range. The SiC deposition parameters have been tuned to reach a...journal article 2014
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Testa, G. (author), Persichetti, G. (author), Sarro, P.M. (author), Bernini, R. (author)A hybrid silicon-poly(dimethysiloxane) (PDMS) optofluidic platform for lab-on-a-chip applications is proposed. A liquid-core waveguide with a self-aligned solid-core waveguide and a microfluidic device are integrated with a multilayer approach, resulting in a three-dimensional device assembly. The optofluidic layer was fabricated with a hybrid...journal article 2014