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Jovic, A. (author), Uto, T. (author), Hei, K. (author), Sancho, Juan (author), Sanchez, Nuria (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo, Eduardo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)
A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power...
conference paper 2018
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Romijn, J. (author), Vollebregt, S. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)
Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure...
conference paper 2018
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Pandraud, G. (author), Milosavljevic, S. (author), Sammak, A. (author), Cherchi, Matteo (author), Jovic, A. (author), Sarro, Pasqualina M (author)
In this work, we present the results of integrated Ge detectors grown on a Si photonic platform for sensing applications. The detectors are fabricated on a passive photonic circuit for maximum coupling efficiency. Measurement results at 1300 nm wavelength show a responsivity of 0.2 A/W and very low dark current levels. For a voltage range...
conference paper 2017
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T. (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)
In this paper we report on gas sensors based on graphene grown by Chemical Vapor Deposition at 850 °C. Mo was used as catalyst for graphene nucleation. Resistors were directly designed on pre-patterned Mo using the transfer-free process we recently developed, thus avoiding films damage during the transfer to the target substrate. Devices...
conference paper 2017
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Vollebregt, S. (author), Dolleman, R.J. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author)
We present suspended graphene pressure sensors fabricated using an innovative surface micro-machining process. The great advantage of this process is that the molybdenum (Mo) catalyst layer for multi-layer graphene chemical vapor deposition (CVD) is also used as a sacrificial layer to suspend the graphene. This method allows for accurate control...
conference paper 2017
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Sokolovskij, R. (author), Iervolino, E. (author), Zhao, Changhui (author), Wang, F. (author), Yu, Hongyu (author), Santagata, F. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)
This paper reports on the layout optimization of Pt-AlGaN/GaN HEMT-sensors for enhancing hydrogen sensor performance. Sensors with gate width and length ratios W<sub>g</sub>/L<sub>g</sub> from 0.25 to 10 were designed, fabricated and tested for the detection of hydrogen gas at 200 °C. Sensitivity, sensing current variation and transient...
conference paper 2017
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)
<br/>In this work, we present an innovative method which enables to solve fundamental limitations affecting graphene-based chemi-sensors operating under environmental conditions, namely the lack of signal saturation and the scarce recovery after the detection step. The method, which exploits the differential current instead of the current itself...
conference paper 2017
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Ricciardella, F. (author), Vollebregt, S. (author), Polichetti, T (author), Alfano, B. (author), Massera, E. (author), Sarro, Pasqualina M (author)
The work herein presented investigates the behavior of graphene-based gas sensors realized by using an innovative way to prepare graphene. The sensing layer was directly grown by chemical vapor deposition on pre-patterned CMOS compatible Mo catalyst and then it was eased on the underlying SiO2 through a completely transfer-free process. Devices...
conference paper 2016
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Vollebregt, S. (author), Alfano, B. (author), Ricciardella, F. (author), Giesbers, A.J.M. (author), Hagendoorn, Y. (author), van Zeijl, H.W. (author), Polichetti, T (author), Sarro, Pasqualina M (author)
In this paper we report a novel transfer-free graphene fabrication process, which does not damage the graphene layer. Uniform graphene layers on 4" silicon wafers were deposited by chemical vapor deposition using the CMOS compatible Mo catalyst. Removal of the Mo layer after graphene deposition results in a transfer-free and controlled placement...
conference paper 2016
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Testa, G. (author), Persichetti, G. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)
Over the last years optofluidics has emerged as a very promising field. The integration at microscopic level between optics and microfluidics provides a number of unique characteristics that cannot be obtained with solid materials only. This paper briefly reviews the state of the art on optofluidics for sensing applications. We first describe...
conference paper 2013
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Pandraud, G. (author), Purniawan, A. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)
We fabricated horizontal slot waveguides using two low temperature deposition techniques ensuring the full compatibility of the processes with CMOS technology. Slots width as thin as 45 nm with smooth slot surfaces can easily be fabricated with simple photolithographic steps. Fundamental TM-like slot mode in which the E-field is greatly enhanced...
conference paper 2012
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Purniawan, A. (author), Pandraud, G. (author), Vakalopoulos, K.A. (author), French, P.J. (author), Sarro, P.M. (author)
conference paper 2012
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)
In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used...
conference paper 2012
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P. (author), Bernini, R. (author)
We report the design and the fabrication of an integrated optofluidic ring resonator based on liquid core antiresonant reflecting optical waveguide (ARROW) operating around ?=635nm with a water filled core (nc=1.33). This waveguide permits a strong coupling between light and analyte as the same microchannel can be used for delivering sample and...
conference paper 2011
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Pandraud, G. (author), Margallo-Balbás, E. (author), Sarro, P.M. (author)
Optical Coherence Tomography (OCT) has found applications in many fields of medicine and has a large potential for the optical biopsy of tumors. One of the technological challenges impairing faster adoption of OCT is the relative complexity of the optical instrumentation required, which translates into expensive and bulky setups. In this paper...
conference paper 2010
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Testa, G. (author), Huang, Y. (author), Zeni, L. (author), Sarro, P.M. (author), Bernini, R. (author)
Integrated liquid core AntiResonant Reflecting Optical Waveguide (ARROW) are used as basic component for the realization of complex optofluidic devices. Liquid core ARROW waveguides permit to confine the light in a low refractive index liquid core, by means of two high refractive index cladding layers designed to form a high reflectivity Fabry...
conference paper 2010
document
Rajaraman, V. (author), Pakula, L.S. (author), Pham, H.T.M. (author), Sarro, P.M. (author), French, P.J. (author)
This paper presents a new low-cost, CMOS-compatible and robust wafer-level encapsulation technique developed using a stress-optimised PECVD SiC as the capping and sealing material, imparting harsh environment capability. This technique has been applied for the fabrication and encapsulation of a wide variety of surface- and thin-SOI...
conference paper 2009
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Kasalynas, I. (author), Adam, A.J.L. (author), Klaassen, T.O. (author), Hovenier, N.J. (author), Panraud, G. (author), Iordanov, V.P. (author), Sarro, P.M. (author)
Detection peculiarities of an un-cooled (room temperature) 8×8 pixel array designed to image broadband THz radiation were investigated. Each pixel consists of a thin conductive film absorber on a dielectric membrane with thermopile temperature readout. It was designed and tested for four combinations of two different types of absorber and...
conference paper 2007
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Bernini, R. (author), De Nuccio, E. (author), Minardo, A. (author), Zeni, L. (author), Sarro, P.M. (author)
In this work we show that integrated silicon hollow core AntiResonant Reflecting Optical Waveguide (ARROW) can be used as a basic tool for the realization of optical sensors. ARROW waveguides, with hollow core, permit to confine the light in a low refractive index liquid core, by means of two cladding layers designed to form a high reflectivity...
conference paper 2007
document
Duc, T.C. (author), Wei, J. (author), Sarro, P.M. (author), Lau, G.K. (author)
conference paper 2007
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