High-Performance Back-Illuminated Three-Dimensional Stacked Single-Photon Avalanche Diode Implemented in 45-nm CMOS Technology

We present a high-performance back-illuminated three-dimensional stacked single-photon avalanche diode (SPAD), which is implemented in 45-nm CMOS technology for the first time. The SPAD is based on a P⁺/Deep N-well junction with a circular shape, for which N-well is intentionally excluded to achieve a wide depletion region, thus...

CMOS-based Integrated Wavefront Sensor

This thesis addresses the design, implementation and performance of an integrated Hartmann-Shack wavefront sensor suitable for real-time operation and compatible with a standard technology. A wavefront sensor can be used for the detection of distortions in the profile of a light beam or of an optical component.With such a sensor, one can, for...