Optimization of a plasma etching machine for failure analysis of semiconductors

Microwave Induced Plasma (MIP) is an advanced decapsulation tool developed by Jiaco Instruments. The goal of this thesis is to optimise the current MIP system. There are two directions: 1. Improve the etching rate. 2. Find selectivity between different materials (Si, SiO2, SiN). The experiments are divided into two parts in total, improved...

Multifunctional UV-C LED Virus Inactivation Experimental Platform

Since the outbreak of SARS-COV-2, various virus inactivation techniques have been applied to suppress the spread of virus. Ultraviolet exposure inactivation is an efficient approach to inactivate virus, within UV band, UV-C with comparatively higher energy. UV-C has been proved to inactivate viruses efficiently, while to figure out efficient...