An energy-efficient readout circuit for resonant sensors based on ring-down measurement

This paper presents an energy-efficient readout circuit for resonant sensors that operates based on a transient measurement method. The resonant sensor is driven at a frequency close to its resonance frequency by an excitation source that can be intermittently disconnected, causing the sensor to oscillate at its resonance frequency with...

High-Aspect-Ratio CMOS add-on modules for RF passive components

Commercial wireless communication technologies stemmed mostly from the research done through and after the Second World War as outlined in Chapter 1. Earlier systems were intended for military applications, hence had very high performance and were very expensive and bulky. Later, with the dawn of commercial microwave applications, the systems...

PECVD silicon carbide surface micromachining technology and selected MEMS applications

Attractive material properties of plasma enhanced chemical vapour deposited (PECVD) silicon carbide (SiC) when combined with CMOS-compatible low thermal budget processing provides an ideal technology platform for developing various microelectromechanical systems (MEMS) devices and merging them with integrated circuits. In this paper we present a...