Micro x-ray source

The invention relates 'to a micro X-ray source comprising a target acting as anode, and a cathode, which during operation interacts with the target and functions as electron source, wherein the target is embodied as a metal foil possessing a spot where the electrons from the electron source arrive, the metal foil being locally thinner at the spot.

Source brightness and useful beam current of carbon nanotubes and other very small emitters

The potential application of carbon nanotubes as electron sources in electron microscopes is analyzed. The resolution and probe current that can be obtained from a carbon nanotube emitter in a low-voltage scanning electron microscope are calculated and compared to the state of the art using Schottky electron sources. Many analytical equations...

Multibeam Electron Source using MEMS Electron Optical Components

Spatial resolution limits in electron-beam-induced deposition

Electron-beam-induced deposition (EBID) is a versatile micro- and nanofabrication technique based on electron-induced dissociation of metal-carrying gas molecules adsorbed on a target. EBID has the advantage of direct deposition of three-dimensional structures on almost any target geometry. This technique has occasionally been used in focused...

Device with foil corrector for electron optical aberrations at low energy

An electron optical device for, in use, creating negative spherical and chromatic aberration and reducing the energy spread in an electron beam travelling on an optical axis, including: at least one conducting plate substantially perpendicular to the optical axis with a first aperture having a first radius around said optical axis, a thin foil...

Field emission photocathode array comprising an additional layer to improve the yield and electron optical imaging system using the same

An electron source provided with a substrate layer (17) and a semiconductor layer (16) with at least one tip (19), the substrate layer (17) being suitable for receiving light of a first wavelength and transmitting the light to the semiconductor layer (16) that is suitable to convert the light into electrons by a photo-electric effect, the...

Electron microscope

An electron microscope provided with an electron source; an energy-dispersive element; an accelerating tube; a plate mounted between the energy-dispersive element and the specimen, in which a selection slit is provided at right angles to the dispersive direction of the dispersive element; source imaging electron optics for obtaining an image of...

Lithography system

Lithography system comprising a light source producing a light beam directed to a mask (3) located in a mask level and an optical demagnifier (4-6) for demagnifying by a factor and focusing the beam. The light beam is focused on a converter element (8) for converting said beam in a further beam having a smaller wavelength than UV light. The beam...

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Document(en) uit de collectie Chemische Procestechnologie