The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

Semitransparency in interaction-free measurements

Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Size and shape control of sub-20 nm patterns fabricated using focused electron beam-induced processing

Apparatus and method for inspecting a surface of a sample

Apparatus and method for inspecting a surface of a sample

Cathodoluminescence Microscopy of nanostructures on glass substrates

Integrated optical and charged particle inspection apparatus: Corrected version

Selectivity of the Fischer–Tropsch process: Deviations from single alpha product distribution explained by gradients in process conditions

Simultaneous Correlative Scanning Electron and High-NA Fluorescence Microscopy

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

Influence of gun design on Coulomb interactions in a field emission gun

Ion beams in SEM: An experiment towards a high brightness low energy spread electron impact gas ion source

Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope

Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si

Angular Dependence of the Ion-Induced Secondary Electron Emission for He+ and Ga+ Beams

Brightness limitations of cold field emitters caused by Coulomb interactions

Multibeam scanning electron microscope: Experimental results

On the influence of the sputtering in determining the resolution of a scanning ion microscope

Positioning Pd catalyst particles for carbon nanotube growth using charge patterns created with a scanning electron microscope