Nanofabrication with a helium ion microscope

Nanofabrication with a High Resolution Helium Ion Beam

Compact Mach-Zehnder interferometer based on self-collimation of light in a silicon photonic crystal

Photonic crystal Mach-Zehnder interferometer operating in the self-collimation mode of light

Method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist

Wavelength-sized cavities in high aspect InP/InGaAsP/InP photonic crystals

Sub-10-nm nanolithography with a scanning helium beam

Wavelength-sized, tunable nanocavity in deeply etched InP/InGaAsP/InP photonic crystals

Nanofabrication with a helium ion microscope

Size-dependent effective Young’s modulus of silicon nitride cantilevers

Tuning of narrow-bandwidth photonic crystal devices etched in InGaAsP planar waveguides by Liquid Crystal infiltration

Effect of undercut on the resonant behaviour of silicon nitride cantilevers

Influence of hydrogen silsesquioxane resist exposure temperature on ultrahigh resolution electron beam lithography

Comparative study of Cl2, Cl2/O2, and Cl2/N2 inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Transmission measurement of the photonic band gap of GaN photonic crystal slabs

Asymmetry reversal and waveguide modes in photonic crystal slabs

High-dose exposure of silicon in electron beam lithography

InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals

2D InP photonic crystal fabrication process development

Two-dimensional photonic crystals from semiconductor material with polymer filled holes