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Searched for: mods_originInfo_publisher_s%3A%22IOP%22
(1 - 7 of 7)
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Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph
A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer
Read-out calibration of a SOI capacitive transducer using the pull-in voltage
An array of highly selective Fabry-Perot optical channels for biological fluid analysis by optical absorption using a white light source for illumination
Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
Measuring and interpreting the mechanical-thermal noise spectrum in a MEMS
Searched for: mods_originInfo_publisher_s%3A%22IOP%22
(1 - 7 of 7)
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