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Zhang, B. (author), Wei, J. (author), Bottger, A.J. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas...conference paper 2019
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Oliveira Alves, A.C. (author), Schut, T. V.P. (author), Groenesteijn, J. (author), Fan, Q. (author), Wiegerink, R. J. (author), Makinwa, K.A.A. (author)This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low...conference paper 2019
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Farhadi Machekposhti, D. (author)Classical human-engineered transmission mechanisms such as linkages, gears, and couplings are well established designs which made out of multiple parts and rigid hinges. However, these mechanisms impose disadvantages such as wear, friction, low precision and reliability, need for assembly and lubrications, and difficulty for miniaturization. By...doctoral thesis 2018
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), Cervone, A. (author), Gill, E.K.A. (author)CubeSats have been extensively used in the past decade as scientific tools, technology demonstrators and for education. Recently, PocketQubes have emerged as an interesting and even smaller alternative to CubeSats. However, both satellite types often lack some key capabilities, such as micropropulsion, in order to further extend the range of...review 2018
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Savov, A.M. (author), Joshi, S. (author), Shafqat, Salman (author), Hoefnagels, Johan (author), Louwerse, M.C. (author), Stoute, R. (author), Dekker, R. (author)A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and...journal article 2018
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Jovic, A. (author), Pandraud, G. (author), Sanchez Losilla, Nuria (author), Sancho, Juan (author), Zinoviev, Kirill (author), Rubio, Jose L. (author), Margallo Balbas, E (author), Sarro, Pasqualina M (author)In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW....journal article 2018
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Houtgast, E.J. (author), Sima, V.M. (author), Bertels, K.L.M. (author), Al-Ars, Z. (author)We present our work on hardware accelerated genomics pipelines, using either FPGAs or GPUs to accelerate execution of BWA-MEM, a widely-used algorithm for genomic short read mapping. The mapping stage can take up to 40% of overall processing time for genomics pipelines. Our implementation offloads the Seed Extension function, one of the main...journal article 2018
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Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author), van Zeijl, H.W. (author), Wei, J. (author)This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup,...conference paper 2018
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Martins Da Ponte, R. (author), Giagka, Vasiliki (author), Serdijn, W.A. (author)This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The...conference paper 2018
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Wu, K. (author), Tichem, M. (author)Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores...journal article 2018
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Sajadi, B. (author)In the last decades, Micro-Electro-Mechanical Systems (MEMS) have drawn immense attention due to their potential use in a wide variety of modern applications, including micro-mechanical sensors and actuators. MEMS are devices combining mechanical and electrical components between 1 and 100 micrometers, all integrated into a single chip. The...doctoral thesis 2017
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), van Zeijl, H.W. (author), Cervone, A. (author), Gill, E.K.A. (author)This paper presents the results of design, manufacturing and characterization of Vaporizing Liquid Microthrusters (VLM) with integrated molybdenum heaters and temperature sensing. The thrusters use water as the propellant and are designed for use in CubeSats and PocketQubes. The devices are manufactured using silicon based MEMS (Micro Electro...journal article 2017
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Basak, S. (author)With the focus in automobile industry to switch from petroleum-based vehicles to all electric vehicles, the increasing demand on harvesting energy from renewable sources for a safer and greener future and the ever-increasing demand of the portable electronics systems, the need for better batteries is eminent. The ultimate aim of battery research...doctoral thesis 2017
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- Vicarelli, L. (author) doctoral thesis 2017
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Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), Zhang, Kouchi (author), Poelma, René H. (author)In this work a method is described to investigate process variations across a wafer. Through wafer MEMS spiral resonators were designed, simulated, fabricated and characterized by measuring the eigenfrequency and corresponding mode shapes. Measuring the eigenfrequency and resulting spectral behavior of resonators on different locations on the...conference paper 2017
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Sajadi, B. (author), Alijani, F. (author), Goosen, J.F.L. (author), van Keulen, A. (author)Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order...journal article 2017
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Kokorian, J. (author), van Spengen, W.M. (author)In this paper we demonstrate a new method for analyzing and visualizing friction force measurements of meso-scale stick–slip motion, and introduce a method for extracting two separate dissipative energy components. Using a microelectromechanical system tribometer, we execute 2 million reciprocating sliding cycles, during which we measure the...journal article 2017
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), Cervone, A. (author)This paper presents a dynamic system approach for the modeling of fluid flow in microchannels to be used in thrust control applications. A micro-resistojet fabricated using MEMS (Microelectromechanical Systems) technology has been selected for the analysis. The device operates by vaporizing a liquid propellant, in this case water, and expelling...conference paper 2016
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Houtgast, E.J. (author), Sima, V.M. (author), Bertels, K.L.M. (author), Al-Ars, Z. (author)We are rapidly entering the era of genomics. The dramatic cost reduction of DNA sequencing due to the introduction of Next Generation Sequencing (NGS) techniques has resulted in an exponential growth of genetics data. The amount of data generated, and its associated processing into useful information, poses serious computational challenges. Here...abstract 2016
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Gkouzou, A. (author), Kokorian, J. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We...journal article 2016