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Oliveira Alves, A.C. (author), Schut, T. V.P. (author), Groenesteijn, J. (author), Fan, Q. (author), Wiegerink, R. J. (author), Makinwa, K.A.A. (author)This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low...conference paper 2019
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Rajaraman, V. (author), Makinwa, K.A.A. (author), French, P.J. (author)We present a simple, flexible and low cost MEMS fabrication process, developed using deep reactive ion etching (DRIE) and wafer bonding technologies, for manufacturing in-plane high aspect ratio (HAR) inertial sensors. Among examples, the design and fabrication results of a two axis inertial device are presented. Fabricated device thickness...conference paper 2008