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Chen, Huan (author), Zhang, Zhaoyu (author), Guo, R. (author), Han, Xutao (author), Zhang, Xuanrui (author), Lin, Junhao (author)The gas state of the insulating gas significantly impacts the development and extent of the partial discharge (PD) in gas-insulated switchgear (GIS). Correlating these two factors allows for a more comprehensive diagnosis of insulation defects. At present, the ultrahigh-frequency (UHF) method has been widely used for PD detection in GIS....journal article 2024
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Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum CommunicationsBonaldi, Michele (author), Borrielli, Antonio (author), Di Giuseppe, Giovanni (author), Malossi, Nicola (author), Morana, B. (author), Natali, Riccardo (author), Piergentili, Paolo (author), Sarro, Pasqualina M (author), Serra, E. (author), Vitali, David (author)In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a...journal article 2023
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Campos de Oliveira, A. (author), Pan, Sining (author), Wiegerink, Remco J. (author), Makinwa, K.A.A. (author)This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...journal article 2022
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Ye, Guigen (author), Fan, X. (author), Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author)In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in...journal article 2022
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French, P.J. (author), Krijnen, Gijs JM (author), Vollebregt, S. (author), Mastrangeli, Massimo (author)Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...journal article 2022
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Wolffenbuttel, R.F. (author), Ghaderi, M. (author)The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large-area metasurface-based absorbers for the mid-infrared is demonstrated. The challenges are in: (a) the limited number of acceptable metals, (b) the thickness tolerance of the layers used in the CMOS process, and (c) the imaging capabilities of...journal article 2022
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...journal article 2022
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Kluba, M.M. (author), Li, J. (author), Parkkinen, Katja (author), Louwerse, Marcus (author), Snijder, Jaap (author), Dekker, R. (author)Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity‐BOX) that contains a patterned BOX...journal article 2021
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Martins Da Ponte, R. (author), Gaio, N. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Dijkstra, Paul (author), Dekker, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)One of the many applications of organ-on-a-chip (OOC) technology is the study of biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It is of paramount importance to construct OOCs equipped with highly compact in situ sensors that can accurately monitor, in real time, the extracellular...journal article 2021
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Verbiest, G.J. (author), Goldsche, M. (author), Sonntag, J. (author), Khodkov, T. (author), von den Driesch, N. (author), Buca, D. (author), Stampfer, C. (author)Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we...journal article 2021
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Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...journal article 2021
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Harjanto, Eric (author), van Horssen, W.T. (author), Tuwankotta, Johan M. (author)In this paper, the oscillations of an actuated, simply supported microbeam are studied for which it is assumed that the electric load is composed of a small DC polarization voltage and a small, harmonic AC voltage. Bending stiffness and mid-plane stretching are taken into account as well as small viscous or structural damping. No tensile...journal article 2021
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Tang, Adrian (author), Alonso Del Pino, M. (author), Kim, Yanghyo (author), Zhang, Yan (author), Reck, Theodore (author), Jung-Kubiak, Cecile (author), Nemchick, Deacon (author), Dyer, Logan (author), Virbila, Gabriel (author), Chattopadhyay, Goutam (author), Chang, Mau Chung Frank (author)This paper presents an overview of a sub-orbital flight demonstration with a 183 GHz and 540–600 GHz limb-sounding instrument aboard a stratospheric ballooncraft. The 183 GHz band provides soundings of stratospheric H 2 O and is implemented with a hybrid CMOS-InP receiver architecture which provides excellent sensitivity while remaining compact ...journal article 2021
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...journal article 2021
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Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...journal article 2020
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Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...journal article 2020
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Middelburg, L.M. (author), Ghaderi, Mohammadamir (author), Bilby, David (author), Visser, Jaco H. (author), Zhang, Kouchi (author), Lundgren, Per (author), Enoksson, Peter (author), Wolffenbuttel, R.F. (author)Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable...journal article 2020
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Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...journal article 2020
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Manca, N. (author), Mattoni, G. (author), Pelassa, Marco (author), Venstra, W.J. (author), van der Zant, H.S.J. (author), Caviglia, A. (author)Strain engineering is one of the most effective approaches to manipulate the physical state of materials, control their electronic properties, and enable crucial functionalities. Because of their rich phase diagrams arising from competing ground states, quantum materials are an ideal playground for on-demand material control and can be used...journal article 2019
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Ramachandrappa Venkatesh, M. (author), Sachdeva, S. (author), El Mansouri, B. (author), Wei, J. (author), Bossche, A. (author), Bosma, D. (author), de Smet, L.C.P.M. (author), Sudhölter, Ernst J. R. (author), Zhang, Kouchi (author)Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...journal article 2019