Searched for: subject%3A%22MEMS%22
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Campos de Oliveira, A. (author), Pan, Sining (author), Wiegerink, Remco J. (author), Makinwa, K.A.A. (author)
This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...
journal article 2022
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Zaliasl, S (author), Salvia, JC (author), Hill, GC (author), Chen, L (author), Joo, K (author), Palwai, R (author), Arumugam, N (author), Phadke, M (author), Mukherjee, S (author), Lee, HC (author), Grosjean, C (author), Hagelin, PM (author), Pamarti, S (author), Fiez, TS (author), Makinwa, K.A.A. (author), Partridge, A (author), Menon, V (author)
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journal article 2015
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Rajaraman, V. (author), Hau, B.S. (author), Rocha, L.A. (author), French, P.J. (author), Makinwa, K.A.A. (author)
This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...
journal article 2010