Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...