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Searched for: subject%3A%22MEMS%22
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Product-internal assembly functions: A novel micro-assembly concept applied to optical interconnects
Learning from nature: Biologically-inspired sensors
Micro-electro-mechanical actuators using confined polymers
Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Searched for: subject%3A%22MEMS%22
(1 - 4 of 4)
Document type
Date
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