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Yang, C.K. (author)This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing applications. This thesis presents an overview of major...doctoral thesis 2012
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Wicaksono, D.H.B. (author)New emerging sensing applications demand novel sensors in micro-/nano-scale to enable integration and embedding into higher level structures or systems. Downsizing the structure will usually decrease the sensitivity of the sensors, since the sensitivity is a function of geometrical parameters, e.g. mass in the case of inertial sensing, and...doctoral thesis 2008
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Perez Garza, H.H. (author)Properties of matter at the nano-scale may be very different from the ones observed at the macro-scale. The continuous variation of characteristics with diminishing size results in relevant changes in behavior. Similarly, these changes are caused by the rise of completely new phenomena (i.e. quantum confinement). Nanoscience can offer an...doctoral thesis 2015
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Ramachandrappa Venkatesh, M. (author)A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of...doctoral thesis 2022
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Quiros Solano, W.F. (author)Drug development is a complex, time-consuming (10 - 15 years) and expensive process. For a new medicine to reach the market, the net expenses covered by the pharmaceutical industry have been estimated to be around $2.6 billion. Nevertheless, the risk of finding adverse effects or toxicity cases once the drug is already on the market is still...doctoral thesis 2019
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Houtgast, E.J. (author)Developments in sequencing technology have drastically reduced the cost of DNA sequencing. The raw sequencing data being generated requires processing through computationally demanding suites of bioinformatics algorithms called genomics pipelines. The greatly decreased cost of sequencing has resulted in its widespread adoption, and the amount of...doctoral thesis 2019
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Zhang, B. (author)Power electronics demand miniaturization, integration, higher electrical and ther-mal conductivities. However, the traditional electronic packaging materials and technology have limitations to meet these requirements. Conventional lead-free die attach materials, like Sn-Ag-Cu solders, can not satisfy high power electronics application, due to...doctoral thesis 2020
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Sun, J. (author)The microelectronics industry, next to the powerful, continuously scaling of integrated circuits, is currently evolving in the diversification of integrated functions, generally referred to as more than Moore (MtM). MtM concerns all technologies enabling microsystems to be elevated to a higher integration level, and with small package size,...doctoral thesis 2020
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Ouyang, B. (author)Ultrasound sensors based on integrated photonics devices provide a new solution to meet the miniaturization demand for the detection functionality of transducers. An important example is the silicon ring-resonator (RR) ultrasound sensor developed in our department. This sensor combines a small footprint with high sensitivity and a low detection...doctoral thesis 2020
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Basak, S. (author)With the focus in automobile industry to switch from petroleum-based vehicles to all electric vehicles, the increasing demand on harvesting energy from renewable sources for a safer and greener future and the ever-increasing demand of the portable electronics systems, the need for better batteries is eminent. The ultimate aim of battery research...doctoral thesis 2017
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Sajadi, B. (author)In the last decades, Micro-Electro-Mechanical Systems (MEMS) have drawn immense attention due to their potential use in a wide variety of modern applications, including micro-mechanical sensors and actuators. MEMS are devices combining mechanical and electrical components between 1 and 100 micrometers, all integrated into a single chip. The...doctoral thesis 2017
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- Vicarelli, L. (author) doctoral thesis 2017
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Farhadi Machekposhti, D. (author)Classical human-engineered transmission mechanisms such as linkages, gears, and couplings are well established designs which made out of multiple parts and rigid hinges. However, these mechanisms impose disadvantages such as wear, friction, low precision and reliability, need for assembly and lubrications, and difficulty for miniaturization. By...doctoral thesis 2018
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- Middelburg, L.M. (author) doctoral thesis 2020
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Li, J. (author)Around 10% of the population will have to go through a catheterization procedure for the treatment of a cardiovascular disease at a certain stage of their lives. During such a procedure, smart catheters will be the "eyes and ears" of the surgeons, significantly improving the diagnosis and treatment. However, there have been very limited...doctoral thesis 2024
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Kawasaki, S. (author)CMUTs (Capacitive Micromachined Ultrasonic Transducers) are causing a technological revolution. Research over the last decade showed that CMUTs can sufficiently replace traditional ultrasound technology based on the bulk PZT, along with other benefits such as lower assembly cost, broader bandwidth and monolithic integration capability with ASICs...doctoral thesis 2024
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Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...journal article 2011
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Peters, T.J. (author), Tichem, M. (author)This paper proposes a microfabrication process for the reliable release of SiO2 beam structures. These structures are intended to be utilized in SiO2 photonic MEMS. A major fabrication challenge is the release of thick (>10 ?m) SiO2 structures with high yield. A single mask process is developed based on temporary reinforcement of the SiO2...journal article 2015
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Tran, A.T. (author), Pandraud, G. (author), Schellevis, H. (author), Alan, T. (author), Aravindh, V. (author), Wunnicke, O. (author), Sarro, P.M. (author)Very thin piezoelectric cantilevers based on AlN layers using titanium Ti thin film electrodes are fabricated and characterized. By optimizing the Ti sputtering parameters, a very low stress (156 MPa) layers stack with high crystallinity and strong (002) orientation of the AlN films is obtained. Finally, a simple fabrication process, fully CMOS...journal article 2011
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Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...journal article 2012