Ultra-thin alumina and silicon nitride MEMS fabricated membranes for the electron multiplication

In this paper we demonstrate the fabrication of large arrays of ultrathin freestanding membranes (tynodes) for application in a timed photon counter (TiPC), a novel photomultiplier for single electron detection. Low pressure chemical vapour deposited silicon nitride (Si _x N _y ) and atomic layer deposited alumina (Al<sub...

Optimization of silicon-rich silicon nitride films for electron multiplication in timed photon counters

The excellent overall properties of silicon nitride, particularly its mechanical strength and resistance to many etchants, make it a widely used material for microsensors and microactuators. In this paper silicon-rich silicon nitride (SRN) films were investigated as material for ultra-thin transmission dynodes in electron multiplication. These...