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Buijtendorp, Bruno T. (author), Bueno, Juan (author), Thoen, David (author), Murugesan, Vignesh (author), Sberna, P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic...journal article 2022
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sten (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)This paper describes the microfabrication and electrical characterization of aluminum-coated superconducting through-silicon vias (TSVs) with sharp superconducting transition above 1 K. The sharp superconducting transition was achieved by means of fully conformal and void-free DC-sputtering of the TSVs with Al, and is here demonstrated in up...journal article 2021
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Visser, Sven (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)This paper presents the fabrication and electrical characterization of superconducting high-aspect ratio through-silicon vias DC-sputtered with aluminum. Fully conformal and void-free coating of 300 μm-deep and 50 μmwide vias with Al, a CMOS-compatible and widely available superconductor, was made possible by tailoring a funneled sidewall...journal article 2020
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Buijtendorp, B.T. (author), Bueno, J. (author), Thoen, David (author), Sberna, V. Murugesan P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen...conference paper 2020
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm...conference paper 2020
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Endo, A. (author), Sfiligoj, C. (author), Yates, S.J.C. (author), Baselmans, J.J.A. (author), Thoen, D.J. (author), Javadzadeh, S.M.H. (author), Van der Werf, P.P. (author), Baryshev, A.M. (author), Klapwijk, T.M. (author)We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685?GHz, two orders of magnitude higher in...journal article 2013
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Barends, R. (author), Hortensius, H.L. (author), Zijlstra, T. (author), Baselmans, J.J.A. (author), Yates, S.J.C. (author), Gao, J.R. (author), Klapwijk, T.M. (author)We study NbTiN resonators by measurements of the temperature dependent resonance frequency and frequency noise. Additionally, resonators are studied covered with SiOx dielectric layers of various thicknesses. The resonance frequency develops a nonmonotonic temperature dependence with increasing SiOx layer thickness. The increase in the noise is...journal article 2008