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Buijtendorp, Bruno T. (author), Bueno, Juan (author), Thoen, David (author), Murugesan, Vignesh (author), Sberna, P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic...journal article 2022
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Buijtendorp, B.T. (author), Bueno, J. (author), Thoen, David (author), Sberna, V. Murugesan P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen...conference paper 2020