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Buijtendorp, B.T. (author), Bueno, J. (author), Thoen, David (author), Sberna, V. Murugesan P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting resonators used in millimeter-submillimeter astronomy would greatly benefit from deposited dielectrics with a small dielectric loss. We deposited hydrogenated amorphous silicon films using plasma-enhanced chemical vapor deposition, at substrate temperatures of 100°C, 250°C and 350°C. The measured void volume fraction, hydrogen...conference paper 2020
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Endo, A. (author), Sfiligoj, C. (author), Yates, S.J.C. (author), Baselmans, J.J.A. (author), Thoen, D.J. (author), Javadzadeh, S.M.H. (author), Van der Werf, P.P. (author), Baryshev, A.M. (author), Klapwijk, T.M. (author)We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685?GHz, two orders of magnitude higher in...journal article 2013
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Buijtendorp, Bruno T. (author), Bueno, Juan (author), Thoen, David (author), Murugesan, Vignesh (author), Sberna, P.M. (author), Baselmans, J.J.A. (author), Vollebregt, S. (author), Endo, A. (author)Superconducting circuit elements used in millimeter-submillimeter (mm-submm) astronomy would greatly benefit from deposited dielectrics with small dielectric loss and noise. This will enable the use of multilayer circuit elements and thereby increase the efficiency of mm-submm filters and allow for a miniaturization of microwave kinetic...journal article 2022