Ultra thin films for sensing and heating of microprobes

This dissertation aims to advance the current state of cantilevers with integrated metal thermal and deflection sensing elements. Metallic sensing elements enable the use of alternative substrate materials (such as polymers), that tend to exhibit higher compliance properties and are more robust (less brittle) compared to Si or Si3N4 cantilevers....

Hot-spot detection and calibration of a scanning thermal probe with a noise thermometry gold wire sample

Measuring the temperature profile of a nanoscale sample using scanning thermal microscopy is challenging due to a scanning probe's non-uniform heating. In order to address this challenge, we have developed a calibration sample consisting of a 1-?m wide gold wire, which can be heated electrically by a small bias current. The Joule heating in the...