Surface-micromachined Silicon Carbide Pirani Gauges for Harsh Environments

Resistive and CTAT Temperature Sensors in a Silicon Carbide CMOS Technology

Towards a Scalable Sun Position Sensor with Monolithic Integration of the 3d Optics for Miniaturized Satellite Attitude Control

Wafer Scale Flexible Interconnect Transfer for Hetrogeneous Integration

Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration

Compressive response of pristine and superconductor coated MWCNT pillars

High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications

Designing a 100 [aF/nm] capacitive transducer

Non-linear bulk micromachined accelerometer for high sensitivity applications

Monolithically Integrated Light Feedback Control Circuit for Blue/UV LED Smart Package

High aspect ratio spiral resonators for process variation investigation and MEMS applications

3D interconnect technology based on low temperature copper nanoparticle sintering

Output blue light evaluation for phosphor based smart white LED wafer level packages