In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T _c cuprate superconductor Bi ₂ Sr ₂ Ca ₁ Cu ₂ O. The mechanical readout is performed by capacitively coupling their motion to a coplanar waveguide microwave cavity fabricated with a superconducting alloy of molybdenum-rhenium. We demonstrate mechanical frequency tunability with external dc-bias voltage, and quality factors up to ∼36 600. Our spectroscopic and time-domain measurements show that mechanical dissipation in these systems is limited by the contact resistance arising from resistive outer layers. The temperature dependence of dissipation indicates the presence of tunneling states, further suggesting that their intrinsic performance could be as good as other two-dimensional atomic crystals such as graphene.

We experimentally investigate dissipation in mechanical resonators made of a disordered superconducting thin film of a Molybdenum-Rhenium(MoRe) alloy. Electrostatically driving the drum with a resonant AC voltage, we detect its motion using a superconducting microwave cavity. From the temperature dependence of mechanical resonance frequencies and quality factors, we find evidence for non-resonant, mechanically active two-level systems (TLSs) limiting its quality factor at low temperature. In addition, we observe a strong suppression of mechanical dissipation at large mechanical driving amplitudes, suggesting an unconventional saturation of the non-resonant TLSs. These observations shed light on the mechanism of mechanical damping in superconducting drums and routes towards understanding dissipation in such devices.

We experimentally investigate the nonlinear response of a multilayer graphene resonator using a superconducting microwave cavity to detect its motion. The radiation pressure force is used to drive the mechanical resonator in an optomechanically induced transparency configuration. By varying the amplitudes of drive and probe tones, the mechanical resonator can be brought into a nonlinear limit. Using the calibration of the optomechanical coupling, we quantify the mechanical Duffing nonlinearity. By increasing the drive force, we observe a decrease in the mechanical dissipation rate at large amplitudes, suggesting a negative nonlinear damping mechanism in the graphene resonator. Increasing the optomechanical backaction further, we observe instabilities in the mechanical response.