XM
X Ma
Authored
20 records found
Digital Micromirror Device (DMD)-based grayscale lithography is a promising tool for three dimensional (3D) microstructuring of thick-film photoresist since it is a maskless process, provides possibility for the free-form of 3D microstructures, and therefore rapid and cost-effect
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We report a multiple patterning approach utilizing
digital-micromirror-device (DMD)-based grayscale lithography, providing a
solution to improve fabrication accuracy for entire target
three-dimensional structure. Because DMD-based lithography system
consists a projection lens
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A low-cost temperature sensor with on-chip sigma-delta ADC and digital bus interface was realized in a 0.5 /spl mu/m CMOS process. Substrate PNP transistors are used for temperature sensing and for generating the ADC's reference voltage. To obtain a high initial accuracy in the r
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