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J.C. van Oven
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Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si
Journal article (2011) -
J.C. van Oven (author)
,
F Berwald (author)
,
K.K. Berggren (author)
,
P. Kruit (author)
,
Kees Hagen (author)
