Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines

Final report of the Leica - CPO 100 Mhz collaboration project TNDO 98-40

Image Rotation in the VB-6HR due to variation in image plane location (Res Note 6.2)

Current fluctuations due to subfield deflection and limitations on subfield deflector position (Res Note 8.1)

Feasibility study for a high brightness X-ray source of 1 micro-meter focal spot diameter

Inventory of options for changing the scope of the Performance Analysis Phase (Res Note 7.1)

to non-linear properties of the final lens material (Res Note 6.1)

Throughput analysis for the Leica VB 6HR lithography system (Res Note 3.1)

Transient behaviour of the Leica VVB6 HR blanker and some alternatives

Transient Behaviour of Conjugate Blankers