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Conference paper (1)

1 records found

1

Fabrication of AlN slender piezoelectric cantilevers for high-speed MEMS actuations

Conference paper (2011) - AT Tran (author) , G Pandraud (author) , H Schellevis (author) , T Alan (author) , V Aravindh (author) , O Wunnicke (author) , Pasqualina M Sarro (author)