In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a Fabry–Perot cavity for electromagnetic cooling of the LC circuit in a dilution refrigerator exploiting the opto-electro-mechanical interaction. To this aim, an optically measured steady-state frequency shift of 380 Hz was seen with a polarization voltage of 30 V and a Q-factor of the assembled device above (Formula presented.) at room temperature. The rf-sputtered titanium nitride layer can be made superconductive to develop efficient quantum transducers.

We present a complete theory for laser cooling of a macroscopic radio-frequency LC electrical circuit by means of an optoelectromechanical system, consisting of an optical cavity dispersively coupled to a nanomechanical oscillator, which is in turn capacitively coupled to the LC circuit of interest. The driven optical cavity cools the mechanical resonator, which in turn sympathetically cools the LC circuit. We determine the optimal parameter regime where the LC resonator can be cooled down to its quantum ground state, which requires a large optomechanical cooperativity, and a larger electromechanical cooperativity. Moreover, comparable optomechanical and electromechanical coupling rates are preferable for reaching the quantum ground state.

Normal-mode splitting is the most evident signature of strong coupling between two interacting subsystems. It occurs when two subsystems exchange energy between themselves faster than they dissipate it to the environment. Here we experimentally show that a weakly coupled optomechanical system at room temperature can manifest normal-mode splitting when the pump field fluctuations are antisquashed by a phase-sensitive feedback loop operating close to its instability threshold. Under these conditions the optical cavity exhibits an effectively reduced decay rate, so that the system is effectively promoted to the strong coupling regime.

We realize a phase-sensitive closed-loop control scheme to engineer the fluctuations of the pump field which drives an optomechanical system and show that the corresponding cooling dynamics can be significantly improved. In particular, operating in the counterintuitive "antisquashing" regime of positive feedback and increased field fluctuations, sideband cooling of a nanomechanical membrane within an optical cavity can be improved by 7.5 dB with respect to the case without feedback. Close to the quantum regime of reduced thermal noise, such feedback-controlled light would allow going well below the quantum backaction cooling limit.

We realise a feedback-controlled optical Fabry-Pérot cavity in which the transmitted cavity output is used to modulate the input amplitude fluctuations. The resulting phase-dependent fluctuations of the in-loop optical field, which may be either sub-shot or super-shot noise, can be engineered to favourably affect the optomechanical interaction with a nanomechanical membrane placed within the cavity. Here we show that in the super-shot-noise regime ('anti-squashed light') the in-loop field has a strongly reduced effective cavity linewidth, corresponding to an increased optomechanical cooperativity. In this regime, feedback improves the simultaneous resolved-sideband cooling of two nearly degenerate membrane mechanical modes by one order of magnitude.

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN_x membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN_x membranes were fabricated and used as optomechanical resonators in a Michelson interferometer, where Q values up to 1.3 × 10⁶ were measured at cryogenic temperatures, and in a Fabry-Pérot cavity, where an optical finesse up to 50000 has been observed.