A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness
Journal Article
(2007)
Author(s)
SL Paalvast (TU Delft - Mechatronic Systems Design)
Henk W. Zeijl (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
J van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:01e523e8-9fa6-4feb-99e4-30acd804637e
More Info
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Publication Year
2007
Research Group
Mechatronic Systems Design
Volume number
17
Pages (from-to)
S197-S203
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