Thermal hard disk drive micro actuator for improved tracking performance

Thermal actuation for percision micro motion and positioning

Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.

Aluminum thermal motor for high bandwidth positioning stages

Fast response thermal linear motor with reduced power consumption.

Al-Si thermal linear motor for high thermal bandwith

Fabrication of Al-Si Thermal Linear Motors

Electromigration in thermal actuators with alluminum heaters

Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

DRIE assisted HAR MEMS processing of inertial sensors and actuators

A micro-electromechanical education module - Part I: thermal actuators

A micro-electromatical education module - part II: electrostatic comb drives

A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness