Person | TU Delft Repository

DRIE assisted HAR MEMS processing of inertial sensors and actuators

Conference paper - V. Rajaraman, SL Paalvast, G Craciun, J.C. Wolff, K.A.A. Makinwa, P.J. French

A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

Conference paper - H.W. van Zeijl, SL Paalvast, Pasqualina M Sarro, J. van Eijk

Al-Si thermal linear motor for high thermal bandwith

Conference paper - SL Paalvast, HTM Pham, J.W. Spronck, R.H. Munnig Schmidt, Pasqualina M Sarro

Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

Conference paper - H.W. van Zeijl, SL Paalvast, J Su, J. van Eijk, Pasqualina M Sarro

Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.

Conference paper - SL Paalvast, Pasqualina M Sarro, R.H. Munnig Schmidt

A micro-electromechanical education module - Part I: thermal actuators

Conference paper - M van der Velden, SL Paalvast, J.W. Spronck, R.H. Munnig Schmidt

Thermal hard disk drive micro actuator for improved tracking performance

Conference paper - SL Paalvast, HTM Pham, Pasqualina M Sarro, R.H. Munnig Schmidt

Aluminum thermal motor for high bandwidth positioning stages

Conference paper - SL Paalvast, HTM Pham, Pasqualina M Sarro, R.H. Munnig Schmidt

Fabrication of Al-Si Thermal Linear Motors

Conference paper - HTM Pham, SL Paalvast, Pasqualina M Sarro

A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Journal article - SL Paalvast, H.W. van Zeijl, Pasqualina M Sarro, J. van Eijk

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

Conference paper - H.W. van Zeijl, J Su, SL Paalvast, Pasqualina M Sarro, J. van Eijk

a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

Conference paper - J Su, H.W. van Zeijl, SL Paalvast, Pasqualina M Sarro, J. van Eijk

A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Conference paper - J Su, H.W. van Zeijl, SL Paalvast, Pasqualina M Sarro, J. van Eijk

Thermal actuation for percision micro motion and positioning

Doctoral thesis - SL Paalvast

A micro-electromatical education module - part II: electrostatic comb drives

Conference paper - SL Paalvast, M van der Velden, J.W. Spronck, R.H. Munnig Schmidt

Electromigration in thermal actuators with alluminum heaters

Conference paper - SL Paalvast, HTM Pham, Pasqualina M Sarro, R.H. Munnig Schmidt

Fast response thermal linear motor with reduced power consumption.

Conference paper - SL Paalvast, HTM Pham, Pasqualina M Sarro, R.H. Munnig Schmidt

SL Paalvast

Authored

DRIE assisted HAR MEMS processing of inertial sensors and actuators

A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

Al-Si thermal linear motor for high thermal bandwith

Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.

A micro-electromechanical education module - Part I: thermal actuators

Thermal hard disk drive micro actuator for improved tracking performance

Aluminum thermal motor for high bandwidth positioning stages

Fabrication of Al-Si Thermal Linear Motors

A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Thermal actuation for percision micro motion and positioning

A micro-electromatical education module - part II: electrostatic comb drives

Electromigration in thermal actuators with alluminum heaters

Fast response thermal linear motor with reduced power consumption.