A micro-electromatical education module - part II: electrostatic comb drives
Conference Paper
(2007)
Author(s)
SL Paalvast (TU Delft - Mechatronic Systems Design)
M van der Velden (TU Delft - Mechatronic Systems Design)
J. W. Spronck (TU Delft - Mechatronic Systems Design)
R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:d46eb830-8b60-4fd2-b821-9d6e2dec0433
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Publication Year
2007
Research Group
Mechatronic Systems Design
Pages (from-to)
542-545
ISBN (print)
0-9553082-2-4
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