DRIE assisted HAR MEMS processing of inertial sensors and actuators

Rajaraman, V.; Paalvast, SL; Craciun, G; Wolff, J.C.; Makinwa, K.A.A.; French, P.J.

DRIE assisted HAR MEMS processing of inertial sensors and actuators

Conference paper (2007)

Authors

V. Rajaraman Electronic Instrumentation -

SL Paalvast Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

G Craciun Electronic Instrumentation -

J.C. Wolff Old - EWI Ch. Integrated Sensing Devices

K.A.A. Makinwa Electronic Instrumentation -

P.J. French Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Elektrotechniek Techniek

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation