Thermal hard disk drive micro actuator for improved tracking performance

Thermal actuation for percision micro motion and positioning

Fast response thermal linear motor with reduced power consumption.

Aluminum thermal motor for high bandwidth positioning stages

Dynamic Model for Design Optimization of a high Bandwidth Thermal Linear Motor.

Electromigration in thermal actuators with alluminum heaters

Fabrication of Al-Si Thermal Linear Motors

Al-Si thermal linear motor for high thermal bandwith

DRIE assisted HAR MEMS processing of inertial sensors and actuators

A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

A micro-electromatical education module - part II: electrostatic comb drives

Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

A micro-electromechanical education module - Part I: thermal actuators

a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness