Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness
Conference Paper
(2007)
Author(s)
HW Zeijl (TU Delft - Electronic Components, Technology and Materials)
SL Paalvast (TU Delft - Mechatronic Systems Design)
J Su (External organisation)
J. van Eijk (TU Delft - Mechatronic Systems Design)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:b91b4ac1-f3c9-4887-837c-48a98ddfd095
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1605-1608
ISBN (print)
1-4244-0842-3
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