Fabrication and characterization of high aspect ratio silicon plate springs with high out-of plane stiffness

Conference Paper (2007)
Author(s)

HW Zeijl (TU Delft - Electronic Components, Technology and Materials)

SL Paalvast (TU Delft - Mechatronic Systems Design)

J Su (External organisation)

J. van Eijk (TU Delft - Mechatronic Systems Design)

Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1605-1608
ISBN (print)
1-4244-0842-3

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