A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness
Conference Paper
(2006)
Author(s)
J Su (External organisation)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
SL Paalvast (TU Delft - Mechatronic Systems Design)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
J. van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f880ca17-5114-4340-b37b-161e983a0db5
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
394-397
ISBN (print)
90-73461-44-8
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