MEMS enabled fast time-resolved X-ray diffraction characterization platform for copper nanoparticle sintering in heterogeneous integration applications
B. Zhang (TU Delft - Electronic Components, Technology and Materials)
J. Wei (TU Delft - EKL Processing)
Amarante J. Böttger (TU Delft - (OLD) MSE-1)
H.W. van Zeijl (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Guo Qi Zhang (TU Delft - Electronic Components, Technology and Materials)
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Abstract
We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas environments. A TRXRD study of nanoCu paste sintering at 200 °C in H2-N2 gas mixture was done using this device. With 1 sec interval, Cu8O reduction and Cu crystallization in sintering is observed. Results can be combined with other studies to optimize material design and process development.