Oxygen related defects in the top silicon layer of SIMOX; the effect of thermal treatments.

A Rivera (TU Delft - Old - Section Defects in Materials)

JMM de Nijs (TU Delft - QN/Fysics of NanoElectronics)

P Balk (External organisation)

A van Veen (TU Delft - Old - sect Radiation Physics Group (TN/RF))

H. Schut (TU Delft - Old - Section Defects in Materials)

Paul F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))