Novel damage model for delamination in Cu/low-k IC backend structures
Conference Paper
(2005)
Author(s)
MAJ van Gils (External organisation)
O van der Sluis (External organisation)
Guo-Qi Zhang (TU Delft - Dynamics of Micro and Nano Systems)
JHJ Janssen (External organisation)
RMJ Voncken (External organisation)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:0a14448b-beb7-49e2-aa6b-71a7c29dd0e4
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Publication Year
2005
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
988-994
ISBN (print)
0-7803-8906-9
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